Fabrication of PDMS microfluidic chip by wet etching silicon
Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering,0577-6686,2005-11.
Zhang, Feng(1); Zhang, Hongyi(1); Zhou, Yongliang(1); Yang, Wei(2); Chen, Binbin(2)
EI:2006039650094
收录情况:EI