学者信息
已发表成果：
WOK 论文 1 篇;其它论文 1 篇;
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Research on the effects of high frequency vibration aging on a micro-scale polymer AZ4620 photoresist film
Journal of Micromechanics and Microengineering,0960-1317,2016-02-08.
Yang, Q.F.(1); Zheng, J.Y.(1); Zhang, Q.(1); Wei, D.Y.(1); Lin, S.J.(1); Lin, J.H.(1); Wang, W.(1)
WOS:000375230700015 EI:20161002046034 10.1088/0960-1317/26/3/035015
收录情况：SCIE、EI