学者信息
已发表成果：
WOK 论文 14 篇;中文核心 3 篇;其它论文 1 篇;专利发明 4 个;
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Large-area homogeneous corrosion process for electrochemical nanoimprint lithography on GaAs wafer by modulating contact pressure
Journal of Electroanalytical Chemistry,1572-6657,2022-03-01.
Meng, Qinghui; Han, Lianhuan; Xu, Hantao; Lin, Xiaoting; Zhang, Jie; Peng, Yunfeng; Su, Jian-Jia; Z...
WOS:000767865600008 EI:20220611606384 10.1016/j.jelechem.2022.116097
收录情况：SCIE、EI -
Spatially-separated and photo-enhanced semiconductor corrosion processes for high-efficient and contamination-free electrochemical nanoimprint lithography
SCIENCE CHINA-CHEMISTRY,1674-7291,2022-03.
Xu, Hantao; Han, Lianhuan; Su, Jian-Jia; Tian, Zhong-Qun; Zhan, Dongping
WOS:000771839900001 EI:20221311845667 10.1007/s11426-021-1194-3
收录情况：SCIE、EI