学者信息
已发表成果：
WOK 论文 80 篇;中文核心 6 篇;其它论文 5 篇;专利发明 7 个;
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An alN-based piezoelectric micromachined ultrasonic transducer with a double-beam suspended structure
JOURNAL OF THE CHINESE INSTITUTE OF ENGINEERS,0253-3839,2021-12.
Chiu, Yihsiang; Wang, Li; Gong, Dan; Yang, Yang; Wang, Weili; Li, Nan; Ma, Shenglin; Jin, Yufeng
WOS:000731891800001 10.1080/02533839.2021.2012519
收录情况：SCIE -
Simulation and Optimization of 3D Heterogeneous Integration of Inertial Micro-System
2021 22nd International Conference on Electronic Packaging Technology, ICEPT 2021,,2021-09-14.
Wang, Nanxin (1); Ma, Shenglin (2); Jin, Yufeng (1); Xing, Chaoyang (3); Li, Nannan (3); Sun, Peng ...
EI:20214511119639 10.1109/ICEPT52650.2021.9568001
收录情况：EI -
A Novel Ultrasonic TOF Ranging System Using AlN Based PMUTs
Micromachines,,2021-03.
Chiu, Yihsiang; Wang, Chen; Gong, Dan; Li, Nan; Ma, Shenglin; Jin, Yufeng
WOS:000633913900001 EI:20211210104862 10.3390/mi12030284
收录情况：SCIE、EI -
A RF Redundant TSV Interconnection for High Resistance Si Interposer
Micromachines,,2021-02.
Wang, Mengcheng; Ma, Shenglin; Jin, Yufeng; Wang, Wei; Chen, Jing; Hu, Liulin; He, Shuwei
WOS:000622813600001 EI:20210909978119 10.3390/mi12020169
收录情况：SCIE、EI
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后摩尔时代，先进封装将迎来高光时刻
中国电子报,,2021-09-07.
马盛林