英文论文
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文献类型
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Journal article (JA)
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题名
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Study of femtosecond laser induced periodic structure on amorphous silicon films and crystallization characteristics
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作者
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Shi, Wei; Qi, Dongfeng; Wang, Wenke; Li, Zhanzhu; Zhang, Jianguo; Zheng, Hongyu; Yang, Bing; Sun, Tengfei; Wei, Juan; Chen, Songyan
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作者单位
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[Shi, Wei; Qi, Dongfeng; Wang, Wenke; Li, Zhanzhu; Zhang, Jianguo; Zheng, Hongyu; Yang, Bing; Sun, Tengfei; Wei, Juan] Shandong Univ Technol, Ctr Adv Laser Mfg CALM, Zibo 255000, Peoples R China. [Chen, Songyan] Xiamen Univ, Dept Phys, Xiamen 361005, Fujian, Peoples R China.
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通讯作者地址
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Shandong Univ Technol, Ctr Adv Laser Mfg CALM, Zibo 255000, Peoples R China.
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Email
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qidongfeng@sdut.edu.cn; zhenghongyu@sdut.edu.cn
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ResearchID
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ORCID
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期刊名称
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Optics and Laser Technology
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出版社
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ELSEVIER SCI LTD
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ISSN
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0030-3992
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出版信息
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2025-02, 181 ():.
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JCR
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影响因子
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ISBN
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基金
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Foundation of Shandong Province [ZR2021QF007, ZR2021MF030, ZR2021QE130]; Taishan Scholar Project of Shandong Province [tsqn202306192]
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会议名称
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会议地点
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会议开始日期
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会议结束日期
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关键词
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Amorphous films; Crystal orientation; Femtosecond lasers; Laser applications; Laser produced plasmas; Optical films; Polycrystalline materials; Silicon wafers
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摘要
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The large area and uniform laser-induced periodic surface structure has a wide range of industrial application potential. The effect of the laser beam scanning velocity and laser fluence on the large-area fabrication of Laser-Induced Periodic Surface Structures (LIPSS), on 50 nm thickness a-Si thin films, is investigated. The results show that the formation and crystallization changes of LIPSS structure are obviously related to the scanning speed and laser fluence. In addition to surface morphology, the crystallinity of polycrystalline silicon can also be controlled by laser parameters. Based on these results, we applied direct laser induced periodic surface structuring to drive the phase transition from amorphous silicon into polycrystalline silicon. And prepare the periodic fringe structure of polycrystalline silicon with good crystallization and regular structure. By changing the polarization direction of the incident laser, the periodic surface structure with specific orientation can be obtained, and the surface of the material can be endowed with significant optical properties. When the prepared polycrystalline silicon periodic structure samples with different orientations are put into dark field microscope, the different color effects of the samples can be observed.
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一级学科
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Optics; Physics, Applied
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WOS入藏号
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WOS:001312320700001
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EI收录号
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20243717022273
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DOI
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10.1016/j.optlastec.2024.111764
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ESI
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收录于
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SCIE, EI
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